Edwards STPA1303CV磁懸浮渦輪分子泵

Edwards STPA1303C Turbomolecular Vacuum Pump - NEW

Edwards STPA1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

• Higher gas throughput
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
• Harsh process compatible
• Increased life

Advanced Controller Design

• Auto tuning
• Self diagnostic functions
• DC motor drive
• Battery-free operation

Compact Design

• Small footprint

• Half rack controller

• Inlet flange	ISO-200F
  Outlet port	KF-40
  Purge port	KF-10
  Water cooling fitting	PT1/4
  Pumping speed
  N2	1,300 l/s
  H2	800 l/s
  Compression ratio
  N2	> 108
  H2	103
  Ultimate pressure w/ bake out heating	10-7 Pa (10-9 Torr)
  Max. continuous outlet pressure	270 Pa (2 Torr)
  Max. nitrogen throughput	1,500 sccm
  Rated speed	35,500 rpm
  Starting time	7 min
  Max inlet flange temperature	120°C
  Input voltage	200 to 240
  Power consumption	0.85 kVA
  Weight	39 kg

  Edwards STPA1303C Turbomolecular Vacuum Pump - NEW
  
  P/N B718-02-020 / B71802020  STPA1303C  ISO-200F
  P/N YT36-B0-030 / YT36B0030  STPA1303C  DN 200 CF
  P/N YT36-26-005 / YT3626005  STPA1303C  ISO-200F TMS
      YT36-26-004 / YT3626004  STPA1303C  DN 200 CF TMS
      YT36-B0-100 / YT36B0100  STPA1303CV  ISO-200F w/ heater band

  
  

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