Edwards EPX180LE - NEW半導體干泵

Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW

The new compact EPX180 high vacuum dry pump offers enhanced performance with a reduced cost of ownership. Using a unique patent-protected mechanism the EPX180 is capable of pumping from the atmosphere to ultimate pressures of < 7.5 x 10-5 Torr. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW

A41943012 / A419-43-012  EPX180LE  208V No TIM 3/8 water connector
A41943014 / A419-43-014  EPX180LE  400V No TIM 3/8 water connectors
A41943022 / A419-43-022  EPX180LE  208V No TIM 1/4 water connector
A41943024 / A419-43-024  EPX180LE  400V No TIM 1/4 water connectors
A41943112 / A419-43-112  EPX180LE  208V C3 TIM 3/8 water connector
A41943212 / A419-43-212  EPX180LE  208V SPI TIM 3/8 water connector
A41943222 / A419-43-222  EPX180LE  208V SPI TIM 1/4 water connector
A41943224 / A419-43-224  EPX180LE  400V SPI TIM 1/4 water connectors
A41943412 / A419-43-412  EPX180LE  208V TEL TIM 3/8 water connector
A41943612 / A419-43-612  EPX180LE  208V Hitachi TIM 3/8 water connector
A41943712 / A419-43-712  EPX180LE  208V MCM TIM 3/8 water connector
A41943714 / A419-43-714  EPX180LE  400V MCM TIM 3/8 water connectors
A41943722 / A419-43-722  EPX180LE  208V MCM TIM 1/4 water connector

OBSOLETED
 
A40902977 / A409-02-977  IPX100
A40902973 / A409-02-973  IPX100
A40904977 / A409-04-977  IPX100A
A40904973 / A409-04-973  IPX100A
A40924977 / A409-24-977  IPX180A
A40924973 / A409-24-973  IPX180A
A40914977 / A409-14-977  IPX500A
A40914973 / A409-14-973  IPX500A

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