Edwards EPX180NE - NEW干式真空泵

Edwards EPX180NE 208V Semiconductor Dry Vacuum Pump - NEW

The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of < 7.5 x 10-5 Torr. The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

Edwards EPX180NE 208V Semiconductor Dry Vacuum Pump - NEW

A41944014 / A419-44-014  EPX180NE  400V No TIM 3/8 water connector
A41944212 / A419-44-212  EPX180NE  208V SPI TIM 3/8 water connector
A41944224 / A419-44-224  EPX180NE  400V SPI TIM 1/4 water connectors
A41944412 / A419-44-412  EPX180NE  208V TEL TIM 3/8 water connector
A41944414 / A419-44-414  EPX180NE  400V TEL TIM 3/8 water connectors
A41944424 / A419-44-424  EPX180NE  400V TEL TIM 1/4 water connectors
A41944512 / A419-44-512  EPX180NE  208V LAM TIM 3/8 water connector
A41944514 / A419-44-514  EPX180NE  400V LAM TIM 3/8 water connectors
A41944712 / A419-44-712  EPX180NE  208V MCM TIM 3/8 water connector
A41944714 / A419-44-714  EPX180NE  400V MCM TIM 3/8 water connectors
A41944724 / A419-44-724  EPX180NE  400V MCM TIM 1/4 water connectors
A41944012 / A419-44-012  EPX180NE  208V No TIM 3/8 water connector

OBSOLETED
 
A40902977 / A409-02-977  IPX100
A40902973 / A409-02-973  IPX100
A40904977 / A409-04-977  IPX100A
A40904973 / A409-04-973  IPX100A
A40924977 / A409-24-977  IPX180A
A40924973 / A409-24-973  IPX180A
A40914977 / A409-14-977  IPX500A
A40914973 / A409-14-973  IPX500A

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