Edwards iGX100M半導體干泵

Edwards iGX100M Semiconductor Dry Vacuum Pump - NEW

The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Edwards iGX100M Semiconductor Dry Vacuum Pump - NEW

A54612958 / A546-12-958  iGX100M  200-230V 50/60 Hz
A54612959 / A546-12-959  iGX100M  380-460V 50/60 Hz

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