Edwards iH80干式真空泵

Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

A59000908 / A590-00-908  iH80  MK5 460V 60Hz three-phase
A59000945 / A590-00-945  iH80  MK5 200/208V 50/60Hz 3-phase
A59000946 / A590-00-946  iH80  MK5 380/415V 50Hz 3-phase
A59000957 / A590-00-957  iH80  MK5 230V 60Hz 3-phase

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