Edwards iH1800干式真空泵

Edwards iH1800 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Edwards iH1800 Semiconductor Dry Vacuum Pump - NEW

A59040908 / A590-40-908  iH1800  460V 60Hz three-phase
A59040945 / A590-40-945  iH1800  200/208V 60Hz 3-phase
A59040946 / A590-40-946  iH1800  380/415V 50Hz 3-phase
A59040957 / A590-40-957  iH1800  230V 60Hz 3-phase
A59060945 / A590-60-945  iH1800  200/208V 50Hz 3-phase
A59042908 / A590-42-908  iH1800HTX  460V 60Hz 3-phase
A59042945 / A590-42-945  iH1800HTX  200/208V 50/60Hz 3-phase
A59042946 / A590-42-946  iH1800HTX  380/415V 50Hz 3-phase
A59042957 / A590-42-957  iH1800HTX  230V 60Hz 3-phase
A59062945 / A590-62-945  iH1800HTX  200/208V 50/60Hz 3-phase

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