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  • 產品資料

    Edwards iXL120N干式真空泵

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    產品名稱: Edwards iXL120N干式真空泵
    產品型號: A54114410
    產品展商: Edwards
    產品文檔: 無相關文檔

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    Edwards iXL120N干式真空泵  的詳細介紹

    Edwards iXL120N Semiconductor Dry Vacuum Pump - NEW

    The iXL120 is a low energy, compact dry pump system that can be mounted on tool or remotely. It is designed to give extremely low cost of ownership. The iXL120 is intended only for use on clean duty applications. The iXL120 is not intended for use with potentially flammable, corrosive, toxic or other hazardous gases since these gases or oxygen can mix within the pump system.


    Typical peak pumping speed (no gas purge/cold pump)     110 m3/h-1 / 65 cfm
    Ultimate pressure 0.01 mbar / 8 mTorr
    Pump inlet flange ISO-63 / NW50
    Exhaust gas outlet NW25
    Intended use Indoor use
    Operating ambient temperature range 5 to 40°C
    Storage ambient temperature range -45 to 55°C
    Maximum relative humidity 80% for temperatures up to 31°C decreasing linearly to 50% relative humidity at 40°C
    Maximum operating altitude up to 2,000 m
    Pollution degree II (IEC 61010) (Normally only non-conductive pollution occurs. Occasionally, however, temporary conductivity caused by condensation must be expected)
    Atmosphere Non flammable and non-corrosive
    Degree of protection provided by enclosure IP31D (EN60529: Degrees of protection provided by enclosures)
    Dimensions 450 x 230 x 275 mm
    Mass 59 kg
    Noise level (at ultimate) < 55 dB(A)
    Vibration level at inlet < 1.5 mm s-1
    Vibration to the floor (when docked) < 0.05 mm s-1
    Initial force to push the pump 0.06 kN
    Sustained force to push the pump 0.04 kN
    Warm up time to nominal pumping performance 45 min

    Edwards MODEL iXL120N Semiconductor Dry Vacuum Pump - NEW
    
    CODE No A541-14-010 / A54114010  iXL120N  E 200-460V 3/8 QC Water Fittings
    CODE No A541-14-020 / A54114020  iXL120N  E 200-460V 1/4 QC Water Fittings
    CODE No A541-14-210 / A54114210  iXL120N  E 200-460V SPI TIM 3/8 QC Water Fittings
            A541-14-410 / A54114410  iXL120N  E 200-460V TEL 3/8 QC Water Fittings
            A541-14-011 / A54114011  iXL120N  E 200-460V 3/8 QC Water Fittings Flow Cont Valve
            A541-14-411 / A54114411  iXL120N  E 200-460V TEL 3/8 QC Water Fittings Flow Cont Valve


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    Copyright@ 2003-2025  上海赫哲真空設備有限公司版權所有      電話:021-34051018 傳真:021-64900946 地址:上海市松江區書慧路628號 郵編:201612
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